摘要
为提高光学元件表面的检测精度,提出基于嵌入技术的光学元件表面疵病在线检测方法。硬件部分:采用嵌入式的系统开发技术,结合传感器设计,建立光学元件表面疵病在线检测的A/D、D/A总线协议。软件部分:采用嵌入式的传感器识别技术,感知光学元件表面疵病的信息,结合边缘及纹理检测技术,识别光学元件表面纹理信息,提取纹理的差异性特征,实现对光学元件表面疵病点的准确定位和检测。通过实验结果得知,该方法能有效实现光学元件表面疵病在线检测,检测的精度较高,定位的均方根误差平均为0.085,整体性能较优越。
In order to improve the detection accuracy of optical element surface,an on-line detection method of optical element surface defects based on embedded technology is proposed. Hardware part: using embedded system development technology and sensor design,the A/D and D/A bus protocols for on-line detection of optical component surface defects are established. Software part: the embedded sensor recognition technology is used to sense the surface defect information of optical elements,and the edge and texture detection technology is combined to recognize the surface texture information of optical elements,extract the difference features of texture,and realize the accurate location and detection of surface defects of optical elements. The experimental results show that this method can effectively realize on-line detection of optical element surface defects,and the detection accuracy is high. The mean root mean square error of positioning is 0. 085,and the overall performance is superior.
作者
洪耀球
占俊
HONG Yaoqiu;ZHAN Jun(School of Information Engineering Jingdezhen University,Jingdezhen Jiangxi 333000,China)
出处
《激光杂志》
CAS
北大核心
2021年第10期162-166,共5页
Laser Journal
基金
国家自科基金地区科学基金项目(No.41761012)。
关键词
嵌入技术
光学元件
表面疵病
在线检测
embedding technology
optical element
surface defects
online detection
