摘要
为了补偿用激光外差干涉法进行纳米测量产生的非线性误差,进行了非线性误差补偿的实验研究。根据镀膜实体角锥棱镜反射光的偏振特性,推导出当激光器出射光束存在偏振椭圆化时,测量角锥棱镜以运动方向为轴线的轴向旋转对非线性误差一次谐波的影响模型。分析表明,测量角锥棱镜以其运动方向为轴线的轴向旋转会减小非线性误差一次谐波。实验显示,当测量角锥棱镜轴向旋转角从0°增加到100°时,非线性误差从3.48 nm减小到1.39 nm,实现了非线性误差一次谐波减小为原来的40%。该方法避免了现有的非线性误差补偿方法光路系统和电路系统复杂的缺点,系统实现很简单。
To compensate the nonlinear errors of heterodyne interferometers in nanometer measurement,an experimental investigation is conducted.Based on the polarization properties of a coated corner-cube retro-reflector,a model is derived for describing the effect of the axial rotation of a measuring cube-corner retro-reflector in the motion direction on the first-harmonic nonlinearity when a laser emits the elliptical polarized light.The simulation results indicate that the first-harmonic nonlinearity can be reduced by the axial rotation of the cube-corner retro reflector.The experimental result shows that the first harmonic nonlinearity is reduced from 3.48 to 1.39 nm when the axial orientation rotation angle of the measuring cube-corner retro reflector increases from 0° to 100°,which is 40% that of the original one.The method simplies the complexes of light path and circuit systems for nonlinear error compensation approaches.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2010年第5期1043-1047,共5页
Optics and Precision Engineering
基金
国家自然科学基金资助项目仪器专项(No.50627501)
关键词
激光外差干涉术
非线性误差
一次谐波
误差补偿
laser heterodyne interferometry
nonlinear error
first-harmonic
error compensation
