摘要
WC-0.5型微型真空泵是基于变容原理工作的往复式真空泵.本文介绍了该泵的工作原理和抽气特性.文中还给出了测试结果.
The micropump type WC-0.5 is reciprocating piston pump on changing valum principle work. In this paper, working principle of pump and its pumping performances are introduced, the measuring results are also given
出处
《电子器件》
CAS
1992年第1期20-24,共5页
Chinese Journal of Electron Devices
