摘要
中等精度的微机械角速率传感器(又称陀螺仪)具有成本低、可靠性高、体积小、重量轻等优点,在民用和军用领域有着广泛的应用前景,具有很强的前沿性,目前世界各国对此非常关注并投入了大量研制和开发费用.根据国际发展趋势和我国的需求,我们研制了静电驱动的振动轮式微机械陀螺仪.本文主要针对这种微机械陀螺仪的特性进行分析,从工作原理,动力学方程出发,推导出了此类陀螺的检测输入角速度灵敏度;开环、闭环传递函数;交流反馈控制提取同相分量和抑制正交分量的原理;以及闭环控制改善动态测量频带的方法.
Abstract Micromechanical inertial instruments with moderate accuracy have the great ad-vantage of low-cost, high reliability, small size, light weight, etc. They can content thefields of tactical weapons systems, industrial and commercial applications. Now, manycountries in the world have put much more attention and a large amount of R. D. fund tothem. According to the trend of research and the requirement of our country, we have de-signed a vibratory wheel rate gyro with static-electrical drive, and capacitance detection.In this paper, the performances of this gyroscope, including the sensitivity, open-loop adclose-loop transform functions of detecting inertial rate are derived, ac feedback control toextract the in-phase component and orthogonal component from original signal is present-ed, and the method of using close-loop control to improve the dynamic measurement band-width is given.
出处
《传感技术学报》
CAS
CSCD
1998年第4期28-36,共9页
Chinese Journal of Sensors and Actuators
关键词
微机械陀螺仪
振动式
速率陀螺
角速率陀螺仪
micromechanical gyrovibratory wheel rate gyrospace angular rate sensorelectrical-static force rebalance loop
