摘要
讨论了基于纵向莫尔条纹检测的光栅自准直仪测量原理.运用光学傅里叶原理推导出,利用线阵CCD取代指示光栅可以在自准直仪中产生莫尔条纹.实验验证了当标尺光栅在CCD投影光栅常量d2与其光栅常量d1之比为s=1.01时,纵向莫尔条纹的放大作用能达到14.14倍.该方法消除了因指示光栅衍射作用影响试验结果的问题,显著提高了系统的角分辨力,并简化了自准直仪光学系统.
The measuring principle of the grating autocollimator is discussed based on vertical stripes Moiré detection.Using the Fourier optics theory,it is able to deduce that the method is feasible which uses the linear array CCD to replace the instructions grating to produce moiré fringes in the autocollimator.The experiment validates that when the ratio s between projection grating constant d2 on CCD and grating constant d1 equals to 1.01,the amplification ratio of the vertical moiré fringes can reach to 14.14.The proposed method can solve the problem that the grating diffraction affects the trial result,simplify the autocollimator optical system,and enhance the system′s resolution.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2010年第3期494-498,共5页
Acta Photonica Sinica
关键词
莫尔条纹
自准直仪
成像光栅
CCD
Moiré fringe Autocollimator Imaging grating Linear CCD
