摘要
考虑膜中应变随位置的变化,应用Pertsev热力学理论,研究了BaTiO3薄膜介电常数随温度的变化。发现衬底与膜间热膨胀系数差和膜的沉积温度显著影响介电常数的值及其峰值温度,介电常数随沉积温度的降低而增大,计算结果与实验数据较好地吻合。
The effect of the strain gradient on the dielectric properties of BaTiO3 thin films was studied in this paper.Within the framework of Pertsev's thermodynamic theory,the dielectric constant of BaTiO3thin films was investigated,taking into account the change of the strain in the thin films at different positions.The results show that the dielectric constant and its corresponding temperature are greatly affected by the film growth temperature and the difference of the thermal expansion coefficients between the substrate and the film.The calculated results are in good agreement with the experimental data.
出处
《河南科技大学学报（自然科学版）》
CAS
北大核心
2009年第6期94-96,共3页
Journal of Henan University of Science And Technology:Natural Science
基金
国家自然科学基金项目(10574066)
河南省教育厅自然科学研究项目(2007140004)
