摘要
利用溶胶-凝胶法(Sol-Gel)在Pt/Ti/SiO_2/Si(100)衬底上制备了BaTiO_3薄膜,研究了不同退火条件下BaTiO_3薄膜的晶相结构及表面形貌,测试了BaTiO_3薄膜的电学性能.发现经900℃,120min退火处理的BaTiO_3薄膜的介电-温度(ε_r-T)关系具有明显的弥散相变特性.
Barium titanate thin films on Pt/Ti/SiO2/Si (100) substrate were prepared by the Sol-Gel process. Polycrystalline structure and surface morphology were observed at different annealing processes and the electrics properties of prepared BaTiO3 thin films were tested. Diffuse phase transition in the Barium titanate thin films at 900℃ for 120 minutes was observed by εr-T curve and was studied based on effect of stress, size of crystalline grain and composition fluctuation.
出处
《哈尔滨理工大学学报》
CAS
2002年第6期55-56,59,共3页
Journal of Harbin University of Science and Technology
基金
广州市教育局科学研究基金项目
