摘要
直拉单晶炉控制系统是多输入多输出非线性控制系统,其直径和温度控制对单晶生长很关键,以PLC作为控制系统核心部件,采用双模糊控制算法设计直拉单晶炉生长控制系统。调试结果表明:该控制系统成功实现了按预设程序进行的晶体生长控制。
Single crystal furnace control system is a multi-input multi-output nonlinear control system,in which the diameter and the temperature control are very critical for the crystal growth,the design takes the control system core part by PLC,dnd uses dual-fuzzy control algorithm design crystal growth furnace control system.The experimental result indicateds： this control system has realized the crystal growth control which carries on according to the preinstall procedure.
出处
《武汉工业学院学报》
CAS
2009年第4期79-82,共4页
Journal of Wuhan Polytechnic University
关键词
单晶体生长
模糊控制
可编程逻辑控制器
growing single crystal
fuzzy control system
programmable logic controller（PLC）
