摘要
研究了微型电场传感器结构释放过程的粘连现象,通过实验采用不同的方法来避免粘连现象的产生,如蒸发干燥法,CO_2临界点干燥法,自组装膜方法,并对这些方法的优缺点进行了比较。结果表明CO_2临界点干燥法和自组装膜方法能够较好的避免粘连现象的产生,提高微型电场传感器的成品率。
The release stiction of miniature electric field sensor （MEFS） was studied in this paper. Some methods such as evaporation drying, C02 critical point drying and the method of self-assembled monolayer were used in the experiment. Advantages and disadvantages of these methods were compared. From the result, CO2 critical point drying and the method of self-assembled monolayer can prevent release stiction effectively and improve the yield of MEFSs.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第B11期328-329,352,共3页
Instrument Technique and Sensor
基金
863项目(2006AA04Z347)
关键词
微型电场传感器
粘连现象
临界点干燥
自组装膜
miniature electrostatic field sensors
stiction
critical point drying
self-assembled monolayer
