摘要
以微悬臂梁的制作工艺为例,针对双材料悬臂梁加工中因为粘附现象造成废品率高的问题,分析了微悬臂梁加工中粘附影响因素,指出表面作用力和残余应力是造成粘附的主要原因,并提出相应控制措施。
Taking the manufacture craft of micro cantilever beam as an example,this article firstly analyses the adhesion factors in micro cantilever beam processing based on the high defective index of double material cantilever beam processing caused by adhesion.Then it points out that the adhesion is mainly caused by surface forces and residual stress.Finally,it offers the corresponding control measures.
出处
《扬州职业大学学报》
2010年第4期33-36,41,共5页
Journal of Yangzhou Polytechnic College
关键词
MEMS
微悬臂梁
粘附
牺牲层
Micro-electric-mechanical system（MEMS）
micro-cantilever beam
adhesion
sacrificial layer
