摘要
用流体力学理论分析了提拉式涂胶过程中胶液的受力流动状态，推导出涂胶厚度与提升速度、胶液粘度等参数的理论关系式。经实际涂胶测定，该关系式反映的变化规律与实际是相符的。
Flowing form of resist forced by gravity during process of dip coating is analyzed in this paper. Relationship among parameters of pulling speed, viscosity & coated resist thickness have been deduced in the view of liquid dynamics. Measured by practical dip coating and experiment, the changing rule reflected by the theoretical results is coincide well with the measuring data.
出处
《光学精密工程》
EI
CAS
CSCD
1998年第5期100-103,共4页
Optics and Precision Engineering
