摘要
本文论述了通过浅硼扩散、氧化退火处理、磷扩散、控制光刻工艺的套刻精度等工艺手段研制成功的光电二极管，其在蓝、紫光方面的光电特性具有明显的优越性。
This paper discusses the photodiode made by light－B diffusion,oxide annealing,P diffusion,photo－fabrication and other processes which has obvious superiority in blue－ purplephotoelectric characteristics.
出处
《电子机械工程》
1998年第4期62-64,共3页
Electro-Mechanical Engineering
