摘要
薄膜脱落的主要原因之一是受薄膜与基体上的界面应力影响,TiN薄膜和钢基体由于其力学性能差异较大,在界面上有很大的应力集中,在钢基体上沉积Ti过渡层能减小其界面应力。研究Ti过渡层厚度对膜基体系结合强度的影响,并借助有限元方法对不同过渡层厚度的膜基体系的界面应力进行分析,研究表明,适当厚度的过渡层能提高Ti-TiN膜层的结合强度。
A main reason of the film delamination is the large interracial stress, which is caused by the different echanical properties between TiN coating and steel substrate. Depositing Ti interlayer on the steel substrate can decrease the interfacial stress. The influence of Ti interlayer thickness on the adhesion is investigated, and the interracial stress is studied using finite element method. The research indicates that suitable interlayer thickness can improve the adhesion of Ti-TiN muhilayer film.
出处
《军民两用技术与产品》
2009年第6期41-42,48,共3页
Dual Use Technologies & Products
关键词
划痕实验
结合强度
过渡层
有限元方法
Scratching test, Adhesion, Interlayer, Finite element method
