摘要
采用真空阴极电弧沉积技术 ,在纯钛球顶高音扬声器振膜上镀类金刚石膜 ,成为类金刚石 /钛复合振膜 .研究了钛基体的材质、厚度、振膜的几何尺寸和形状、类金刚石镀膜工艺参数对复合振膜性能的影响 .在镀膜过程中采用特殊的辅助夹具以及合理的遮挡技术 ,保证振膜不变形和最佳的类金刚石膜层厚度分布 ,使类金刚石 /钛复合振膜的频响达到 30 k Hz,并且能实现批量生产 .
DLC films have been deposited on the loudspeaker diaphragm of pure Ti by means of vacuum cathodic arc deposition to produce DL C/Ti composite diaphragm.Inf- luence of the material quality and thickness of Ti substate,the appearance of diaphragm and deposition parameters of DL C films on properties of the composite diaphragm have been studied.The application of special clamping tools and proper sheltering technology during deposition can assure a non- deformable diaphragm and an optimum thickness distribution of DLC films.As a result,the frequency respondence of DLC/Ti composite diaphragm can reach30 k Hz,and the diaphragms are capable of being produced in batches.
出处
《广东有色金属学报》
1998年第1期52-56,共5页
Journal of Guangdong Non-Ferrous Metals
基金
中国有色金属工业总公司高新技术课题
关键词
VCAD
类金刚石膜
扬声器
振膜
vacuum cathodic arc deposition,DL C film,loudspeaker diaphragm
