摘要
介绍了国外硅基非致冷微测辐射热计红外焦平面阵列（Ｓｉ－ＵＭＢＩＲＦＰＡ）的典型结构、制备工艺技术以及ＵＭＢＩＲＦＰＡ的性能参数。
This paper describes typical structure and fabrication technology of uncooled micro-bolometer infrared focal plane arrays (UMBIRFPA) being researched abroad.The performance para meters of UMBIRFPA are also given.
出处
《半导体光电》
CAS
CSCD
北大核心
1998年第1期1-4,共4页
Semiconductor Optoelectronics
关键词
红外探测器
红外焦平面阵列
热像仪
Uncooled Thermal Detectors,Micro-bolometer,Infrared Focal Plane Array,Thermal Imager
