摘要
多晶硅薄膜太阳电池兼具单晶硅的高转换效率和多晶硅体电池的长寿命的特点,其制备工艺比非晶硅薄膜材料的制备工艺相对简化。文章介绍了多晶硅薄膜太阳电池材料制备工艺和材料性能;阐述了多晶硅薄膜太阳电池Si3N4膜的沉积和玻璃制绒等关键工艺;综述了玻璃衬底多晶硅薄膜太阳电池的发展现状。
The potycrystalline Silicon thin fihn solar cells have the advantages of high conversion efficiency, long life time and simple manufacturing processing etc. What reviewed in the paper is the current status of polycrystalline Si thin film solar cell on glass, including the fabrication of polycrystalline Si thin films, the properties of the thin film materials and relevant issues in the device processing. At last, summarized the development status of polycrystalline Si thin film solar cell on glass.
出处
《可再生能源》
CAS
2008年第5期72-75,共4页
Renewable Energy Resources
关键词
玻璃
多晶硅薄膜
太阳电池
glass
polycrystalline Silicon thin film
solar cell
