摘要
用磁控溅射法在玻璃衬底上制备了掺铝氧化锌(AZO)薄膜,然后用脉冲式快速光热处火(PRTP)法对样品进行了600 ～800℃的退火处理。采用X射线衍射仪(XRD)、分光光度计、四探针等测试手段对AZO薄膜的结晶性能、透光率和导电性能进行了表征。结果表明:(1)薄膜退火后透光率基本维持在退火前(82 ～92%)的水平,而电阻率则由10-4Ω.cm上升了1到6个数量级,已丧失了"导电膜"意义;(2)样品具有好的结构性能有利于提高样品的导电性能。对此现象进行了理论分析。
ZnO：Al（AZO） thin films on glass were prepared by magnetron sputtering and subsequently annealed at 600℃ to 800℃ by pulsed rapid thermal processing （PRTP）. The XRD, Spectrophotometer and Four-point probe instruments were employed to measure the crystallinity, transmittance and conductivity of the AZO films. The results show that,（1）the resistivity of AZO films one to six order of magnitude from 10^-4Ω·cm while the transmittance keeps the same level of 82-92% as before annealing. Those cannot be used as electrode in solar cells after annealing; （2） It is clear that the good structural properties benefits the conductivity of the sample. The phenomenon analyzed in theory.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2007年第5期1182-1186,共5页
Journal of Synthetic Crystals
基金
National Basic Research Program of China(973).(No.2006CB202601)
关键词
AZO薄膜
退火
透过率
电阻率
AZO thin films
anneal
transmittance
resistivity
