摘要
介绍了一种新型多波长绝对距离干涉测量系统。系统采用633nm的双纵模He-Ne激光器和629nm的He-Ne激光器,组成三级合成波长链对较大距离进行精密测量,并作了误差分析。系统采用高稳定度的声光晶体对各波长分别进行偏频,再用外差探测法测量出光束通过参考光路和测量光路后的位相差。简要介绍了629nm的He-Ne激光器的设计方案。
A new kind of multi-wavelength absolute distance interferometer is introduced. It is composed of a double-mode 633nm He-Ne laser and a 629nm He-Ne laser, consisting three degree synthetic wavelengths. It can measure a comparatively large distance with a high precision. In this interferometer, 2 acousto-optic frequency sifters with high stability are used to shift the frequency of each wave, and by this way the phase difference between the reference and measurement paths precisely are measured. A brief introduction of how to design the 629nm He-Ne laser is also provided.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2008年第5期681-683,686,共4页
Optical Technique
关键词
激光干涉仪
绝对距离干涉术
多波长
相位测量
laser interferometer
absolute distance interferometry
multi-wavelength
phase measurement
