摘要
提出了一种采用双纵模稳频激光器的新型绝对距离测量外差干涉仪。该干涉仪探测两个波长各自的外差信号， 通过测量两信号的相位差， 直接测量出合成波的小数级次。指出了两波长间的相互耦合对测量精度的影响， 提出了补偿方法， 在２５ ｍ 的测量范围取得了 １４０ μｍ 的测量精度。
An absolute distance heterodyne interferometer using a dual longitudinal mode He Ne laser is proposed. In this interferometer an optical heterodyne technique is used to enhance the signal/noise ratio of its opto electrical signals. By measuring the phase difference between these two heterodyne signals, the fractional fringe of the synthetic wavelength is measured precisely and directly. Also the influence on the measuring accuracy from the mode coupling is analyzed. The compensation for this error is discussed. An accuracy of 140 μm in 25 m is obtained.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1999年第9期1274-1278,共5页
Acta Optica Sinica
基金
国家自然科学基金
关键词
外差干涉仪
绝对距离干涉仪
相位测量
模耦合
heterodyne interferometer, absolute distance interferometry, phase measurement, mode coupling.
