摘要
为解决激光频率扫描干涉(FSI)测距系统随着目标距离增大测量精度下降的问题,提出了一种利用光纤组量程扩增技术实现大尺寸绝对测距的精度补偿方法。采用参考光路光程可变递增的方法,建立了光纤组量程扩增的激光频率扫描干涉绝对测距系统,通过FSI原理实现了量程扩增部分光程差的自标定。对应不同测量目标,通过粗测和精确测量,实现了系统原点自标定、光纤通道切换和目标值的精确测量。实验结果表明,在测量距离大于3 000mm后,光纤组量程扩增测距系统具有更高的绝对距离测量重复精度,在6 700mm目标位置的绝对距离重复精度比FSI测距系统的重复精度提高了2.4μm,并且在大尺寸测量方面更具有一定的优势。
A precision compensation method for large scale of absolute distance measurement with range amplification technology by optical fiber pairs is proposed, which can be used to maintain measurement accuracy for laser frequency sweeping interferometry （FSI） system with object distance＇s accretion. A range amplified absolute distance measurement system with laser frequency sweeping interferometry is established by a variable and incremental reference path, the optical path difference of the range amplified part is self-calibrated in FSI measuring way. The origin of the system is self-calibrated and the reference path is switched after rough measurement, then the measuring result is achieved after fine measurement. The range amplified system with optical fiber pairs has a higher absolute distance repeatability precision when the object distance gets larger than 3 000 mm. The repeatability precision of the range amplified system is increased by 2.4μm compared with FSI system for absolute distance of 6 700 mm.
出处
《西安交通大学学报》
EI
CAS
CSCD
北大核心
2013年第9期77-82,共6页
Journal of Xi'an Jiaotong University
基金
国家自然科学基金资助项目(50975225
50935006)
国家"863计划"资助项目(2012AA040701)
关键词
激光频率扫描干涉
光纤组量程扩增
原点自标定
大尺寸测量
laser frequency sweeping interferometry
range amplification with optic fiber pairs
self-calibration of the origin
lager scale metrology
