摘要
叙述了离子束辅助镀膜的特点。对冷阴极和热阴极两种离子源作了比较。论述了冷阴极离子源及其在真空镀膜中的应用。
In optical surface film coating ,the ion auxiliary deposition(IAD) technique has been widely used.Based on the analysis on the operating condition of IAD,this article compares the two kinds of the ion auxiliary deposition techniques using hot cathode ion source and cold cathode ion source and points out that,with the help of cold ion source,the film deposited on the optical surfaces has the better microstructure.In vacuum deposition,using of the cold cathode ion source can reduce the deposition period.
出处
《激光技术》
CAS
CSCD
北大核心
1997年第5期318-320,共3页
Laser Technology
