摘要
本文介绍了LY—3A型冷阴极离子源的工作原理、结构特征和实验结果。用BF_3、PH_3、Ar、N_2等作放电物质,在离子源放电功率小于100W的情况下,^(31)P^+、^(40)Ar^+、N_2^+的束流强度均大于2mA、^(11)B^+的束流强度大于1mA,同时具有较高成份的多电荷态离子。采用溅射的方法离化固体元素,已离化引出~9Be^+、^(27)Al^+、^(24)Mg^+、^(48)Ti^+、^(52)Cr^+、^(96)Mo^+、^(101)Ru^+、^(106)Pd^+、^(157)Gd^+、^(167)Er^+等难熔金属元素离子。
The Working principle, structural feature and some experimental results of LY-3A type cold cathode ion source are given. Using BF3, PH3, Ar, N2 as discharge materials, typical beam currents are above 2mA for 31P+, 40Ar+, N2+and 1mA for 11B+ while the power consumption of the ion source is less than 100W. Meantime there are quite a few multiply-charged ions in the ion beams.The solid elements are ionized by sputtering and the ions of refractory metal elements, such as 9Be+, 27Al+, 24Mg+,48Ti+, 52Cr+, 96Mo+, 101Ru+, 106Pd+, 157Gd+,l67Er+, have been extracted from the ion sources.
出处
《微细加工技术》
1992年第1期22-28,共7页
Microfabrication Technology
关键词
冷阴极
离子源
Cold-cathode ion source
Ion ratio
Beam current
Refractory metal ions
