摘要
采用RF磁控溅射法在PP(丙纶)纺粘法非织造布上制备掺铝氧化锌(AZO)薄膜,并利用原子力显微镜(AFM)、扫描电镜(SEM)及能谱仪(EDX)对AZO薄膜的表面形貌、结构及元素成分进行表征和分析。结果表明:在PP基上溅射沉积的AZO薄膜具有纳米级的尺度,而且颗粒分布均匀、致密;经过溅射后薄膜颗粒中除原先的C元素外,只含有Zn、Al、O元素,而且薄膜的纯度很高。随着沉积时间的延长,纳米AZO薄膜致密性、均匀性越来越好。
AZO films have been deposited on PP nonwoven substrates by RF magnetron sputtering. The morphology, structure and component element of the AZO films have been observed and analyzed by atom force microscopy （AFM）, scanning electron microscopy （SEM） and energy-dispersive X-ray （EDX）. The results show that the AZO films deposited on PP are in nano-levels, and the distribution of grains is uniform and compact. Besides the primary C element, the grains only contain Zn, Al and O elements after sputtered, and the purity of nano-grain is high as well. With the prolongation of deposition time, the compactness and uniformity of AZO films will become better and better.
出处
《丝绸》
CAS
北大核心
2008年第9期28-30,共3页
Journal of Silk
基金
安徽省自然基金资助项目(070414192)
