摘要
提出了一种结构新颖的硅微选频振动传感器阵列，这种传感器是由一系列具有一定谐振频率的硅悬臂梁、扫描电路和ＭＯＳ开关等组成。它是利用半导体集成电路工艺技术与硅的各向异性腐蚀相结合的方法混合集成在一块三维硅基体上的。介绍了这种传感器的结构、工作原理与关键的研制工艺。
: This paper proposes a novel frequency selective micro-silicon vibration sensor array.The sensor consists of a series of silicon cantilevers with given resonant frequencies,scanning circuit and MOS switch etc,which are integrated on a three-dimensional silicon wafer by means of semiconductor IC process and silicon anisotropic etching technology.The structure,operation principle and key fabrication technology of the sensor are presented and the experiment results are given.
出处
《半导体光电》
CAS
CSCD
北大核心
1997年第6期422-425,共4页
Semiconductor Optoelectronics
基金
国家自然科学基金
关键词
传感器阵列
谐振频率
悬臂梁
各向异性腐蚀
: Sensor Array,Vibration Frequency,Silicon Cantilever,Anisotropic Etching Technology
