摘要
本文简要介绍了该电源的指标及电路．并详细论述了提高电源稳定度和可靠性的方法和措施，最后给出了测试结果和运行情况。
The main technical specifications and the circuit principle blockdiagram of analyzer power supply are briefly described. Especially the methods and measures to enhance its stability and reliability are discussed. Finally,the results of test and operation are given.
出处
《微细加工技术》
1997年第4期19-24,共6页
Microfabrication Technology
关键词
强流离子注入机
磁分析器
电源
微电子技术
high-current ion implanter
analyzer power supply
stability
reliability
