摘要
介绍了用离子束辅助蒸发工艺在高折射率锗（Ge）基片上镇制的高性能硫化锌（ZnS）红外增透膜（也称红外减反射膜）及其工艺的研制，通过与常规热蒸发工艺镀制的硫化锌增透膜的性能相比较，证实了离子束辅助蒸发技术对提高硫化锌红外增透膜的光学特性、膜层品质及改变薄膜的结构和应力状态有良好的效果。试验表明用该技术镀制高性能硫化锌红外增透膜能满足长寿命、高可靠卫星红外地球敏感器的使用要求。
This paper presents the high performance ZnS infrared Anti -reflecion film de-posited by the IAD technology in the Ge Substrate with high refractive index and gives its pro-cess development. As compared with the ZnS anti - reflestion film deposited by the normalthermal vapor deposition coating, the IAD technology has improved the optical characteritic ofZnS IR anti - reflection film coating quality, film microstracture and stress state. The testresults hare shown that the IAD Technology can be able to meet the requrimets for IR earthsensors with long life and high reliability.
出处
《航天控制》
CSCD
北大核心
1997年第4期70-74,共5页
Aerospace Control
关键词
离子束蒸发
热蒸发
红外增透膜
硫化锌
薄膜
Ion beam evaporation
Thermal evaporation
IR anti-reflection film
