摘要
微夹钳是最典型的微执行器，它可以充当机器人手爪，配合各种多自由度驱动装置成为微机器人。微夹钳单元技术与微装配、微操作、微焊接、微封装等系统技术紧密地联系在一起。由于它的重要性和广泛的应用，近年来已成为微机械领域研究的热点。本文首先介绍了微小领域中物体夹持的物理背景，阐述了粘附力的规律和解决方法；详细介绍了已有的微夹钳的研究进展状况，结合作者的科研工作，阐述了有代表性的几种微夹钳的工作原理及工艺制作方法；指出了微夹钳的发展和功能优化方向，以期对微夹钳的研究工作起到一定借鉴作用。
Microgripper is the most typical microeffector.It can be used as robot's hand,which is connected with any multiple DOF driving appatus to realize real robot.The success of the microgripper technique is closely concerned with the system technique,such as microassembly,micromanipulation,microweld and microenvelop.Because of the importance and wide usage of the microgripper,the microgripper has become the most vital area in MEMS field recently.First this article introduces the physics phenomenon about clamping microobjects with microgrippers.Second the article explains the discipline of the adhensive forces between the object and the gripper paws,and the reduction methods for them.At the end of the article,we introduce several different work principles based on our research work,and point out the future of the microgripper.
出处
《光学精密工程》
EI
CAS
CSCD
1997年第4期8-13,共6页
Optics and Precision Engineering
基金
国家科委攀登计划资助
