摘要
为实现微系统产业化开发适用于微型零件操作和装配的微夹钳,采用电热驱动方式、V形梁阵列式电热驱动器为钳体部分提供输入位移,钳体部分应用拓扑优化方法进行设计以实现输入位移放大。金属镍作为制作微夹钳的材料,用紫外光刻微电铸脱模技术工艺制作了电热镍微夹钳。通过正交试验,得到加工SU-8铸模的最优工艺参数,对影响工艺质量的各个因素进行详细讨论并给出解决方法,并加工出了钳体尺寸在毫米量级,最小特征尺寸为10μm,厚度为30μm的电热微夹钳。对制作的微夹钳在0～2.5V直流电压下进行动态测试,夹持端位移最大可达67μm,最大夹持力可达0.8N,可以满足微机电系统微操作的夹持要求。
In order to bring about industrialization in micro-electro-mechanical systems（MEMS）, the microgripper applied in microoperation and microassembly is developed. It is based on electrothermal principle. V-shaped beam array electrothermal microactuators is adoped to generate displacement for microgriper, and the microgripper is designed by topology optimization. Niclel is selected for fabricating the electrothermal microgripper, and UV-LIGA process is used to fabricate the electrothermal microgripper. The optimized parameters for SU-8 mold are obtained through orthogonal experiment. All factors influenced process are discussed in detail and the resolved methods are given. And an electrothermal nickel microgriper with whole dimension in a millimeter magnitude, depth 30 μm and minimum character size 10 μm. Final dynamic performance of the nickel microgripper is experimented within 0～2.5 V range. The maximum tweezing displacements of up to 67 μm is recorded for this nickel microgripper, and the maximum clamping force can reach 0.8 N. This microgeipper can satisfy microoperation in MEMS.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2007年第5期116-121,共6页
Journal of Mechanical Engineering
基金
国家自然科学基金重点资助项目(50535030
50475153)
