摘要
运用静止挡板截断蒸气流以改变衬底膜厚分布是真空镀膜中一项重要技术。本文以文献[1]中的膜厚分布基本公式出发。分析研究了有关技术途径。提出了适用于各类劈式光学薄膜制备的平面静止挡板透视投影设计法。
An important technique of vacuum coating--Vapor-folw interruptiois by me- ans of static baffles is investigated in this paper.On basis of the fundamental formulas presented by liteature(1), we derive a designing method of plane baf- fles with perspective projection for fabricating many kind of optical wedge fil- ters.
出处
《光学仪器》
1990年第6期19-25,共7页
Optical Instruments
