摘要
本文介绍了国内首见报导的32×64元硅化铂肖特基势垒红外焦平面的物理设计方法。作者从计算探测目标的辐射能量出发,综合考虑了器件的结构、材料和工艺参数,电参数,光学系统参数和响应率的非均匀性,以信嗓比作为焦平面的品质因数进行了性能优化计算。根据系统参数和现有工艺条件,预计焦平面对室温景物成象的温度分辨率优于1°K,这同器件的热象测试结果符合得相当好。
This paper describes the physical design method of 32 × 64 PtSi Schottky Barrier Infrared Focal Array(FPA) reported for the first time h our country.Starting from calculating the radiant energy of the detected subjects, the author synthetically studies the performance of 32 × 64 element FPA which concerned the structural parameters, material parameters, technological parameters, electricalparameters, optical parameters and responsivity nonuniformity of the FPA. Taking the signal-to noise as ratio the merit factor of the focal plane, the perfor-mance optimum calculation of the FPA is processed. On the basis of various parameters and existing technological conditions, it is predicted that the thermal image temperature resolution for sunjects at room temperature is better than 1K, this coincides very well with the thermal image test results of FPA.
关键词
硅化铂
肖特基势垒
红外焦平面
PtSi Schottky barrier infrared focal plane
Figure of merit
Thermal image test
Temperature resolution.
