摘要
分析了由于反射镜倾斜导致的可调谐F-P(Fabry-Perot)滤波器失谐。设计了一种柔性铰链式微位移机构,由压电陶瓷驱动,采用平行四连杆机构进行传动导向。采用该机构驱动F-P腔镜扫描克服了直接使用压电陶瓷带来的腔镜倾斜问题。该机构已应用于可调谐F-P滤波器中,输出信号多周期峰值幅度均匀,重复性好。
The output signal distortion of tunable F-P filters caused by the F-P cavity mirror tilt was analyzed. Using a parallel linkage flexible hinge as a guide translator, a micro-displacement mechanism which was driven by a piezoelectric actuator was designed. Using the mechanism the F-P filter distortion problem generated by its cavity mirror tilt was solved when the scan mirror was pushed to move by the piezoelectric actuator directly. By this way, the uniformity of peak amplitudes of output by the tunable F-P filter is greatly improved in several periods. The mechanism has been successfully applied to the tunable F-P filter. The experiment shows the repeatability of the tunable F-P filter is remarkably improved.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2007年第3期409-411,共3页
Optical Technique
