摘要
介绍了微机械惯性仪表（包括微机械陀螺仪、微机械加速度计及微惯性测量组合）在世界各国的进展，阐述了它们所采用的结构方案、电路原理以及制造工艺，比较了各种主要制造技术的优缺点。
The advance in micromechanical inertial instruments (including micromechanical gyroscopes,micromechanical accelerometers and micro inertial measurement units) all over the world are introduced in this paper.Their construction schemes,electronic circuit principles and fabrication processes are described.Their advantages and defects are compared with each other.The applicable technique pathway of developing the micromechanical inertial instruments in our country is suggested .
出处
《半导体情报》
1997年第2期1-10,22,共11页
Semiconductor Information
关键词
微机械陀螺仪
微机械惯性仪表
微结构制造技术
Micromechanical gyro Micromechanical accelerometer Micro inertial measurement unit Fabrication technique of micro construction
