摘要
在外部电极电容耦合的管状反应器内对乙烯基三甲基硅烷(VTMS)进行等离子体聚合。总结了有和无等离子气体存在时VTMS的聚合规律,并运用旋转中心混合方法(RCC)优选实验数据,求出VTMS的动力学方程。用IR.X射线和元素分析对聚合物结构进行了表征。
The plasma polymerization of vinyltrimethylsilane (VTMS) was car-ried out in a capacitively coupled tubular reactor with external electrodes. The poly-merization laws were concluded when plasma. gases existed or not. and RotatableCenter Composite (RCC) way was used to optimize experimental data. The structureof polymer was characterized with IR. X-ray and elemental analysis.
出处
《辐射研究与辐射工艺学报》
CAS
CSCD
北大核心
1990年第1期59-64,共6页
Journal of Radiation Research and Radiation Processing
基金
国家自然科学基金
关键词
乙烯基
三甲基硅烷
等离子体
聚合
Plasma polymerization
Vinyltrimethylsilane
RCC
IR
Character
