摘要
介绍了一种基于垂直扫描白光干涉法的6JA干涉显微镜改造的总体方案、系统测量原理、仪器结构，以及对标准样板及圆柱零件的测试结果。该测量系统已对本科生和研究生开出实验并投入实用，其垂直分辨率为2nm，横向分辨率为0．3μm，垂直扫描范围为80μm。
This paper introduces the upgrade of the 6JA interferometer based on vertical scanning white-light interfer- ometric. The alteration plan, principle, structure and experiment results are also given. This instrument has been successfully used for several applications and made several experiment for graduate students. The vertical measurement range and resolution of the instrument are 80μm and 2 nm. The horizontal resolution is 0.3 μm.
出处
《实验技术与管理》
CAS
2007年第4期58-60,共3页
Experimental Technology and Management
关键词
6JA干涉显微镜
表面形貌测量
扫描白光干涉法
6JA interferometer
surface topography measurement
scanning white light interference
