摘要
为了弄清阳极氧化制备TiO2纳米管阵列的影响因素及形成机理,研究了HF浓度W(HF)=0.1~1.0%,电压(5V^30V),时间(20min^120min)对阳极氧化TiO2纳米管阵列形貌的影响,用X射线衍射(XRD)和扫描电子显微镜(SEM)对其结构进行表征,并通过电流时间变化曲线探讨了TiO2纳米管阵列的形成机理.结果表明,氧化电压、电解液浓度、氧化时间是影响TiO2纳米管阵列形貌的主要因素,TiO2为不定形结构.只要延长时间,在低浓度W(HF)=0.1%HF溶液中也能得到TiO2纳米管阵列.阳极氧化的整个过程分为3个阶段,纳米管阵列的形成是场增强氧化、场增强氧化膜溶解和HF化学溶解共同作用并达到动态平衡的结果.
To ravel the effect factors and the formation mechanism of the anodic oxidation TiO2 nanotube arrays, the effect of the concentration of HF solution W（HF）=0.1～1.0%, voltage（5～30 V）, time （20 min～120 min） on surface morphology of the TiO2 nanotube arrays were studied in this paper. The microstructure of the TiO2 nanotube were characterized by XRD and SEM. The formation mechanism of TiO2 nanotube arrays were analyzed by current time variety curve. The result show that voltage, electrolyte concentration and oxidation time are the primary factors on the surface morphology of the TiO2 nanotube arrays which is amorphous phase. After increasing the anodic oxidation time, TiO2 nanotube arrays can also be gained in low concentration HF solution W（HF）= 0.1%. The whole process of anodic oxidation includes 3 stages, the formation of TiO2 nanotube arrays are the result of interaction and dynamic equilibrium with Field-assisted oxidation, Field-assisted dissolution, and HF Chemical dissolution.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期2310-2313,共4页
Chinese Journal of Sensors and Actuators
基金
卫生部科学研究基金-福建省卫生教育联合攻关计划资助(WKJ2005-02-008)
福建发展改革委员会支持(2004[47])
