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与标准集成电路工艺兼容的硅基光学器件研究 被引量：1

A review on silicon photonics devices compatible with standard integrated circuits processes
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摘要 着重介绍了与标准集成电路工艺兼容的硅基光学器件的最新研究进展,包括硅基光发射器、硅基光波导和调制器件、硅基光电探测器和接收机以及硅基光电子集成回路的工作原理、制作工艺和集成技术.与标准集成电路工艺兼容的硅基光电子集成回路能有效地解决电互连芯片内部串扰、带宽和能耗等问题,并能够充分利用现有成熟的集成电路工艺,实现大规模生产,具有广阔的实用前景. This paper introduces the latest advancement in silicon photonics compatible with standard integrated circuits processes, including the theory and design methods of silicon-based light emitting devices（LED）, optical waveguides and modulators, optical detectors and receivers, and silicon optoelectronics integration （Si-OEIC）. Silicon based optoelectronics integration compatible with standard integrated circuits processes could eliminate the influences of the crosstalk, bandwidth and power consumption in electrical interconnection. It has broad prospects in application.
作者 刘海军 高鹏 陈弘达 顾明 许奇明 刘金彬 黄北举
机构地区 中国科学院半导体研究所集成光电子学国家重点联合实验室
出处 《高技术通讯》 CAS CSCD 北大核心 2006年第9期985-989,共5页 Chinese High Technology Letters
基金 863计划（2002AA312240,2003AA312040）和国家自然科学基金（60536030）资助项目.
关键词 集成电路工艺 硅基光电子集成回路 全硅光互连 integrated circuits processes, silicon optoelectronics integration （Si-OEIC）, all silicon optical interconnection
分类号 TN492 [电子电信—微电子学与固体电子学]
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高技术通讯
2006年 第9期

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