摘要
介绍了一种基于MEMS和表面微加工工艺的差分式微电容加速度计,并通过分析,构建了该加速度计的数学模型,并简要介绍了该加速度计的一些简单应用.
This paper introduces a differential microcapacitive accelerometer based on MEMS and surface micromachining and constructs a mathematic method by analyzing its circuit model. This paper also introduces some simple applications of the microcapacitive accelerometer.
出处
《洛阳师范学院学报》
2006年第5期53-54,共2页
Journal of Luoyang Normal University
