摘要
阐述了近几年来国内外关于电子陶瓷材料的集成研究状况及发展趋势,指出了电子陶瓷薄膜材料的产品在诸多领域的重要应用。对电子陶瓷材料与微电子器件的集成,以及电子陶瓷在微传感器和MEMS中的应用情况作了重点介绍。
Electronic ceramics research is driven by technology and device applications. Materials integration plays an increasingly important role driven by the interest in integrating electronic ceramic functions into convertional semiconductor chips as well as by the evolution of multifunctional components and systems.The progress and trend of integration of electronic ceramic materials were reviewed.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2004年第3期13-17,共5页
Electronic Components And Materials
基金
湖北省自然科学基金资助项目(2001ABB017)
关键词
电子陶瓷
集成
微电子器件
薄膜材料
electronic ceramics
integration
microelectronic devices
film material
