摘要
介绍了微机电传感器自20世纪80年代初期以来发展及应用的现状与趋势。重点讨论了微机电惯性传感器在国际上的先进水平和国内的研究成果,以及军民两用领域的应用前景。最后提出了进一步研究的方向。
The actuality and trend of developments and applications on micro electromechanical sensors since initial stage of 20 century eight decade are introduced. The international advance levels and native research achievements of inertial micro electromechanical sensors, and their application futures in both fields of military and civilian are discussed in emphases. The farther study aspects of micro electromechanical sensors are brought forward finally.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2003年第11期7-16,共10页
Journal of Mechanical Engineering
基金
国家微纳米预研项目(41308050103
41308050108)
关键词
微机电传感器
微机电系统
微机电惯性传感器
MEMS
Micro electromechanical systems Micro electromechanical sensors Inertial micro electromechanical sensors
