摘要
根据差动电容传感器测量微位移的原理和变压器电桥所具有的其变比为实数且稳定性高、变比精度高、灵敏度高及工作频率范围比较宽的特点,本文提出将差动电容传感器与变压器电桥相结合来测量转子表面的方案并给出各参数之问的关系;分析了影响传感器测量精度的因素。
According to the measurement micro displacement principle of differential capacitance sensor and the features of electric transformer bridge's change rate which is the actual number, high stability,high accuracy,high sensitivity and relatively wide scope of work frequency, the paper will introduce the combine of differential capacitance sensor and electric transformer Bridge to measure rotor surface and give the relationship between the parameters; analyze the influencing factors of precision measurement sensor.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2006年第z2期1650-1652,1655,共4页
Chinese Journal of Scientific Instrument
关键词
表面测量
差动电容式位移传感器
二维旋转台
Surface measurement Differential capacitance sensors Two-dimensional rotary platform
