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圆形振动膜ZnO压电微传声器的研制 被引量：4

Silicon based ZnO piezoelectric micro-microphone with circular vibrating film
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摘要 本文介绍了一种新型圆形振动膜ZnO压电微传声器的制备,并对传声器制备的工艺过程进行了较为详细的描述。圆形振动膜的压电传声器与以前方形振动膜结构设计相比,较大幅度提高了传声器的灵敏度和成品率,灵敏度达到-70dB(相对于1V/Pa),成品率达到80%。 This paper presents the fabrication of a silicon based ZnO piezoelectric micromicrophone with novel circular vibrating film. Micromachined techniques to fabricate the device are described in detail. The circular vibrating film structure of this microphone is a modification of the rectangular one, and the performances of the device are improved. The sensitivity is -70dB （ref. 1V/Pa） and the rate of finished product is 80%.
作者 杨楚威 李俊红 黄歆 汪承灏
机构地区 中国科学院声学研究所
出处 《应用声学》 CSCD 北大核心 2006年第4期197-200,共4页 Journal of Applied Acoustics
基金 国家自然科学基金青年科学基金项目(10204021) 国家自然科学基金SOC重点基金项目(90207003)
关键词 硅微传声器 圆形振动膜 压电薄膜 ZNO Silicon micro-microphone. Circular vibrating film, Piezoelectric film, ZnO
分类号 TN641 [电子电信—电路与系统] TN304.18 [电子电信—物理电子学]
  • 相关文献

参考文献3

  • 1Ried R P,Kim E S,Hong D M et al.Journal of MEMS,1993,2(3):111～120.
  • 2杨楚威,黄歆,李俊红,解述,魏建辉,马军,汪承灏.硅微ZnO压电薄膜传声器的研制[J].应用声学,2003,22(5):1-4. 被引量：5
  • 3郝震宏 李剑成 乔东海.声学技术,2005,24:561-563.

二级参考文献6

  • 1杨楚威 黄歆 解述 等.声学技术,2002,21:257-258.
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共引文献4

同被引文献25

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引证文献4

二级引证文献8

应用声学
2006年 第4期

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