摘要
为解决传统含铅传感器的环保问题,设计基于铌酸钾钠(KNN)无铅压电薄膜的MEMS声学传感器,采用COMSOL Multiphysics有限元分析法分析并优化其发射性能。研究构建复合压电板与含实际衬底支撑的两种传感器有限元模型,借复合压电板等效模型优化器件半径、压电层/中性层厚度、上电极板半径等关键几何参数。分析发现,谐振频率与器件半径负相关,与压电层、振动层厚度正相关;当上电极板半径与器件半径比为1..2、KNN层与Si层厚度比为2..1时,器件位移响应最佳。仿真结果显示,优化后传感器发射性能显著提升,适用于超声波发射场景,为无铅压电MEMS声学传感器的制备与性能调控提供可靠数值依据。
In order to solve the environmental protection problem of traditional lead-containing sensors,a MEMS acoustic sensor based on potassium sodium niobate(KNN)lead-free piezoelectric thin-film is designed,and the finite element analysis method in COMSOL Multiphysics is adopted to analyze and optimize its emission performance.Two finite element models of the sensor are constructed;mcluding a composite piezoelectric plate and a sensor with actual substrate support.The equivalent model of the composite piezoelectric plates is used to optimize key geometric parameters,such as device radius,piezoelectric layer/neutral layer thickness,and upper electrode plate radius.The analysis found that the resonance frequency is negatively correlated with the device radius and positively correlated with the thicknesses of the piezoelectric layer and the vibration layer.When the ratio of the upper electrode plate radius to the device radius is 1:2,and the ratio of the thickness of the KNN layer to the Si layer is 2:1,the device exhibits the optimal displacement response.Simulation results show that the emission performance of the optimized sensor is significantly improved,and it is suitable for ultrasonic emission scenarios.This paper provides a reliable numerical basis for the preparation and performance regulation of leadfree piezoelectric MEMS acoustic sensors.
作者
田辰
胡胜
何强
聂京凯
陈斌杰
尹航
TIAN Chen;HU Sheng;HE Qiang;NIE Jingkai;CHEN Binjie;YIN Hang(China Electric Power Research Institute,Beijing 100192,China;State Grid Hunan Electric Power Research Institute Co Ltd Electric Power Research Institute,Changsha 410000,China;Research Center for Advanced Functional Ceramics,Wuzhen Laboratory,Jiaxing 314500,China)
出处
《传感器与微系统》
北大核心
2026年第2期37-41,共5页
Transducer and Microsystem Technologies
基金
国家电网有限公司科技项目(5500-202423136A-1-1-ZN)。
