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反射镜补偿检验 被引量:8

Compensating test of the Reflective Mirror
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摘要 在光学加工中,反射镜可以很好地补偿待检镜,解决加工中的一些难题。通过三级像差理论求解反射镜补偿检验二次曲面的初始结构参量,令球差系数ΣS1=0,补偿镜e1^2可选择球面或椭球面,推导出补偿镜和待检镜之间关系的表示式。e1^2=0、0.1、0.2、0.3、0.4,按公式画出e2^2/a-β,ar02/r01~β的曲线图,从中确定β∝α,e1^2,e2^2,r01,r02,d12的对应关系,解出补偿检验的初始结构参量,分析补偿镜放置待检镜曲率中心前α〉0,α〉1和后α〈0、β≥0,β≤0对应待检镜的e2^2各种求解。分析看出:这包括了补偿检验的全部功能,对凸和凹的二次曲面都可以进行补偿检验,其中有以前提出的解,也有以前没有发现的解,对补偿检验的全面分析是非常有益的。 The mirror can compensate the tested mirror very well in the optical manufacturing, which with some difficult problems can be solved in the manufacturing. Based on the third-order aberration theory the initial configuration parameters of the mirror compensator in testing the conicoid are solved in theory, making spherical aberration coefficient ΣS1=0, and the relations between the compensating mirror and the tested mirror are given, with the surface of compensator chosen as sphere or ellipsoid. Setting e1^2=0,0.1,0.2,0.3,0.4, the graph of e2^2/α~β,αr01/β is plotted based on the equations, the relations of β and α, e1^2, e2^2, r01, r02, d12 and the initial configuration parameters of the compensating mirror are also gotten. There are two cases about the compensator: one is α〉0, α〉1, and the compensator is set in front of the curvature center of the tested mirror; the other is α〈0, and the compensator is set in back of the curvature center of the tested mirror,both including β〉0, β=0, β〈0. By analysing in detail, it is found that both the convex and the concave conicoid mirrors can be compensated and tested by mirror compensators, all cases of compensations and tests are included, some have been brought forward, but others have not, which benifits the general analysis of the compensation and the test.
出处 《光学学报》 EI CAS CSCD 北大核心 2006年第6期831-835,共5页 Acta Optica Sinica
关键词 成像系统 补偿检验 三级像差理论 二次曲面 imaging system compensating test third-order aberration theory conicoid
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共引文献51

同被引文献54

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  • 4袁立银,郝沛明,周森林.非球面齐明透镜的设计[J].量子电子学报,2006,23(2):159-163. 被引量:5
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