摘要
本文回顾了超晶格概念的提出及材料制备技术的进展;描述了半导体超晶格,量子阱材料的物理图象和基本特性,及其相关元器件的重要意义;综述了当前半导体超晶格,量子阱材料的研究进展及其应用,包括:(1)异质结构;(2)调制掺杂;(3)渐变带隙及带隙工程;(4)应变层超晶格;(5)新概念及新效应探索。文末概述了作者在量子阱超晶格材料的设计与性能预测方面进行的一些工作。
The concept of superlattice and the advance of the specimen prepsring tech-niques has been reviewed.The basic physical features of semiconductor superlattices andquantum wells have been shown.Developments and applications of semiconductorsuperlattices and quantum well materials have been summarized in the following aspects:(1)heterojunction structures(2)modulation doping(3)graded gap and bandgap engi-neering(4)strained-layer superlattice(5)searching for new concepts and phenomena.
关键词
半导体器件
量子阱
超晶格
材料
superlattices
quantum-wells
semiconductor devices
