摘要
在四电极系统中在一定束能量下改变电场强度比仅轻微地改变束电流。在一定电场 强度比下可以用五电极系统在一定范围内改变束电流或束能量。使引出孔的分布补偿束 电流密度的高斯分布。使参数匹配并实行程序控制。
In a four-electrode system,changing the electric field ration only slightly changes the ion beam current at a certain beam energy. At a certain electric field ratio,five electrode,systems could be used to change the ion beam current and the beam energy to a certain extent.The distribution of the extraction apertures is made to compensate the Gaussan of the ion beam current density. The parameters are matched with each other and the. programme control is put into practice
出处
《真空》
CAS
北大核心
1992年第3期27-33,共7页
Vacuum
