摘要
设计一种新型电容式微位移传感器,给出了检测电路。原理为20 kHz的正弦信号加在传感器上,传感器产生的交流电压与电容电极之间的距离成正比。电路包括正弦信号发生电路、精密全波整流电路、滤波电路和信号放大电路。实验证明:该传感器线性度小于3%,分辨率优于0.01μm.
Based on the principle of capacitance transducer of displacement, a new transducer was designed and made . The circuit is consisted of sin signal generator, high precision entire wave converting circuit , low-pass filter and signal magnifier. Experimental results show that linerarity of 3 % and resolution of 0.01 tan can be achieved.
出处
《仪表技术与传感器》
CSCD
北大核心
2006年第1期6-7,17,共3页
Instrument Technique and Sensor
关键词
电容
传感器
微位移
高线性
检测电路
Capacitance
Sensor
Displacement Measurement
High Linear
Detecting Circuit
