摘要
介绍一种新型微位移电容式传感器的工作原理，探讨了一些参数对传感器的影响，并给出了实验分析的结果．
A new type capacitive displacement transducer, which includes capacitance changing with relative displacement between two ends, is investigated in this study both on the theoretical and practical performance. The theoretical performance of the transducer has been predicted and simulated on the computer. An experiment has been worked out and performed, and an application is recommended.
出处
《上海大学学报（自然科学版）》
CAS
CSCD
1995年第6期652-657,共6页
Journal of Shanghai University:Natural Science Edition
关键词
微位移
电容
传感器
straightness
micro-displacement
capacitance
capacitive transducer
