摘要
系统地总结了微型旋转超声电机的发展,详细地叙述了各种微型电机的驱动机理、工艺方法和性能指标,并分析了各自的优缺点。讨论了在微型旋转电机设计中应注意的一些关键问题,为下一步微型旋转超声电机以及MEMS驱动器的研究工作提供了参考依据。
In this review, the history of development of rotational ultrasonic micro-motor has been summarized systematically. Various principles and their fabrication processes of ultrasonic micro-motors are introduced in details as well as their performances. The advantages and disadvantages of different type of micro-motors have been compared. In order to offer the reference basis with directive significance for further research works of rotational ultrasonic micro-motors and micro-actuators in MEMS, several key design issues of ultrasonic micro-motor have been discussed.
出处
《压电与声光》
CSCD
北大核心
2005年第6期627-630,642,共5页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金重点资助项目(50235010)
