摘要
介绍一种新型结构光栅测微传感器，测量范围０～２０ｍｍ，采用双轴直线运动轴承导轨，结构新颖紧凑，测量精度为±１μｍ。
A new structure of grating micro-measuring linear encoder is described in this paper. Itsmeasuring length is 0. 0--20. 0mm. By means of two linear mobile bearing orbits,the apparatus is fashionable as well as compact in structure the measuring accuracy is up to ± 1. 0μm.
出处
《光学精密工程》
EI
CAS
CSCD
1996年第2期87-90,共4页
Optics and Precision Engineering
关键词
计量光栅
测微传感器
直线运动
轴承导轨
Metrology grating technique, Micro--measuring linear encoler ,Linear mobilebearing orbit
