摘要
开发了一种大量程、高分辨率、非接触式与接触式测量两用的新型表面形貌测量仪器。仪器本体为非接触测量轮廓仪,通过插入接触式测头实现接触测量。非接触式测头采用傅科法自动聚焦原理,接触式测量采用微恒力电感测量原理,它们共用一个音圈电机,各自跟踪电气零位,实现大量程、高分辨率的位移测量。文中还介绍了仪器采用的共运动基面二维工作台。
A new type of measuring instrument for surface profile was developed. It has a large measuring range and high resolution, and the workpieces can be measured not only by touch mode, but also by non-touch one. The construction of system is originally used as a non-contact mode, and the contact measurement is realized by inserting contact probe. The principle of noncontact probe bases on an improved Foucauh focus detection method, and that of contact measurement is found on inductance sensor with micro-force. The both probes share in a voice coil motor, but trace independent electric zero position to realize displacement measurement with a large range and a high resolution. A 2D working platform with mutual base level adopted, in the instrument is also introduced.
出处
《工具技术》
北大核心
2007年第10期85-88,共4页
Tool Engineering
关键词
表面形貌测量
接触/非接触测量
聚焦误差
电感传感器
音圈电机
surface profile measurement, contact/non-contact measurement, focused error, inductance sensor, voice coil motor
